70(W) x 140(L) x 31.5(H) mm
LOW WEIGHT :
650 ~ 950 gram
SMALL VOLUME :
100 CC
VACUUM :10-3 mbar (with rotary pump)
10-6 mbar (with turbomolecular pump)
CONTACT
CONTACT
DIMENSION :
70(W) x 140(L) x 31.5(H) mm
LOW WEIGHT :
650 ~ 950 gram
SMALL VOLUME :
10-3 mbar (with rotary pump)
10-6 mbar (with turbomolecular pump)
70(W) x 140(L) x 31.5(H) mm
LOW WEIGHT :
650 ~ 950 gram
SMALL VOLUME :
10-3 mbar (with rotary pump)
10-6 mbar (with turbomolecular pump)
Temperature Ranges
Peltier Stage
-40 ℃ ~ 200 ℃
Resistor Heater Stage
RT ~ 1000 ℃
Cryo Stage
80 K ~ RT
-40 ℃ ~ 200 ℃
Resistor Heater Stage
RT ~ 1000 ℃
Cryo Stage
80 K ~ RT
Number of Probe
Standard Model For the analysis of most electrical properties
4 Ch Probes
6 Ch Probes
8 Ch Probes
24 Pins LCC
48 Pins LCC
.
.
+ Providing various probe distributions
according to the electrodes and applications
4 Ch Probes
6 Ch Probes
8 Ch Probes
24 Pins LCC
48 Pins LCC
.
.
+ Providing various probe distributions
according to the electrodes and applications
Unique Probing Method
Quick & Easy
A unique probe module is only 30x20x20 mm.
A stable contact is possible even on a 20x20 ㎛ contact pad.
As the probe module has a very flexible motion,
it smoothly follows the displacement of the contact point caused
by thermal expansion and maintains a stable contact.
A unique probe module is only 30x20x20 mm.
A stable contact is possible even on a 20x20 ㎛ contact pad.
As the probe module has a very flexible motion,
it smoothly follows the displacement of the contact point caused
by thermal expansion and maintains a stable contact.
see video at: https://youtu.be/Ikb9RtfGxFs
Manual Probe
External Probing Arm
hyperfine
Piezo-Driven Positioner
When stability and resolution are of the utmost importance, the Piezo-Driven
positioner provides the perfect solution. Positioners are ultra-compact and based on
slides with linear ball bearings. They are well-suited for micro-positioning systems,
where space is the top priority.
Piezo-Driven Positioner
When stability and resolution are of the utmost importance, the Piezo-Driven
positioner provides the perfect solution. Positioners are ultra-compact and based on
slides with linear ball bearings. They are well-suited for micro-positioning systems,
where space is the top priority.
Resolution: 50 nm
Force: 1 N( 100 g)
Travel(X, Y): 11 mm
Travel(Z): 4.5 mm
Force: 1 N( 100 g)
Travel(X, Y): 11 mm
Travel(Z): 4.5 mm
Probe Tips
All probes have spring structure inside and/or outside the probe module.
It never loses contact stability in gas flow and scanning experiments.
There is also a great advantage that the contact does not become unstable even
if there is a movement due to thermal expansion and vibration.
The 50 & 100 μm tip can be selected when the contact pad is small.
For more precise probing, it is recommended to use optional Precise probing arm.
* The larger tip size, the better sample clamping force and durability.
It never loses contact stability in gas flow and scanning experiments.
There is also a great advantage that the contact does not become unstable even
if there is a movement due to thermal expansion and vibration.
The 50 & 100 μm tip can be selected when the contact pad is small.
For more precise probing, it is recommended to use optional Precise probing arm.
* The larger tip size, the better sample clamping force and durability.
Inconel Alloy Probe Tip
Inconel Alloy Base Probe Tip
Tungsten Base Probe Tip
Rh Bulk Wire Probe Tip
 |
Tip | Material | Plate | Applicable models | Remark |
| 300 μm | Inconel alloy | Au | MPS-PT MPS-PTH MPS-LN |
Max. operating Temp. 200 °C Affordable price |
 |
Tip | Material | Plate | Applicable models | Remark |
| 300 μm | Inconel alloy | Rh | MPS-PTH MPS-CHL MPS-LN |
Max. operating Temp. 450 °C |
 |
Tip | Material | Plate | Applicable models | Remark |
| 50 μm 100 μm |
W | Rh | MPS-PTH MPS-CHL MPS-LN |
Max. operating Temp. 450 °C |
 |
Tip | Material | Plate | Applicable models | Remark |
| 250 μm | Rh bulk wire | none | MPS-PT MPS-PTH MPS-CHL MPS-CHH MPS-LN |
Max. operating Temp. 1000 °C Great durability |
Applications
Accessaries
Contact
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