Ceramic Heater Type Micro Vacuum Probe Station (MVPS-CH) is a subminiature probe station with vacuum and temperature control functions. The equipment can measure the electrical and dielectric properties of thin films in the temperature range of room temperature to 750 ℃. Also, optical measurements are possible using sapphire viewport cover, and microscopes can be used to observe samples. The equipment is capable of measuring without a cooling unit for one hour at 500 ℃. Additional cooling systems are required for measurements above that.